Bao, Min-Hang.

Analysis and design principles of MEMS devices by Minhang Bao. - Amsterdam ; Oxford : Elsevier, c2005.

Includes bibliographical references and index.

License restrictions may limit access.

9780444516169 008045562X = Analysis and design principles of MEMS devices

GBA515718 bnb


Microelectromechanical systems.
Microtechnology.

621.381 / BAO-A

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