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1. Microsensors, MEMS, and smart devices by Julian W Gardner,Vijay K Varadan and Osama O Awadelkarim

by Gardner, Julian W.

Material type: book Book Publisher: New Delhi Wiley 2001Availability: Items available for loan: RGU Central Library [Call number: 621.381 GAR-M] (3). Checked out (2).
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2. Principles of microelectromechanical systems/ Ki Bang Lee

by Lee, Ki Bang.

Material type: book Book Publisher: New Jersey JOhn Wiley 2011Availability: Items available for loan: RGU Central Library [Call number: 621.381 LEE-P] (2).
3. Analysis and design principles of MEMS devices by Minhang Bao.

by Bao, Min-Hang | ebrary, Inc.

Source: Referex Mechanical Engineering and MaterialsMaterial type: book Book; Format: electronic available online remote; Literary form: Not fiction ; Audience: Specialized; Publisher: Amsterdam ; Oxford : Elsevier, c2005Online access: Full text available from Referex Mechanical Engineering and Materials Availability: Items available for loan: RGU Central Library [Call number: 621.381 BAO-A] (4). Checked out (1).

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